Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

In this study we used the commercial 0.35 μm CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the pot...

SOI-CMOS-MEMS Electrothermal Micromirror Arrays

MEMS WDM Routers Using Analog Micromirror Arrays

There have been increasing interests in programmable optical add-drop multiplexers (OADM) and wavelength-selective switches in wavelength-division-multiplexed (WDM) networks. Conventional OADM has one input and one output channels, in addition to an add and a drop channels [l]. It is also called 1x1 OADM. Dynamic OADM with more than one output ports offers greater flexibility and functionality ...

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia se...

High-resolution Wavefront Control Using Micromirror Arrays

Silicon deformable mirrors have the potential to modulate spatial and temporal features of an optical wavefront. This capability is critical for systems in which aberrations affect optical beam quality, including many applications in laser communication, medical imaging, astronomy, and target tracking. The main goal of the work presented here was to design, build, and test a 1024 actuator wavef...